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Portable Air Particle Counter Model 3411

Product Code
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BEME3411
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Description

 

MET ONE 3411 portable air particle counters are designed specifically for semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications. With industry leading ISO 21501 accuracy and reproducibility, the MET ONE 3411 is the cleanest 0.1um portable air particle counter in the market.

Keeps your cleanroom clean
The only 0.1um particle counter without a dirty exhaust fan.

Hot-swappable batteries –100% instrument availability
Hot-swappable batteries eliminate the need to stop measuring while your instrument charges or for powering down, zero counting and powering back up.

Test wizard for easier compliance - organize your cleanroom
Save time and eliminate errors when monitoring your semiconductor production environments.

Sequential sampling - manifold system
Low cost site monitoring solutions can be deployed with the MET ONE Model 3432 manifold. Sample sequentially from up to 32 locations with a single MET ONE Model 3411 series particle counter.

Flexible communications – easy setup and data transfer
Reduce your paperwork with wireless, Ethernet and serial communication options to MET ONE Data Management or your own software solutions.

Intuitive user interface
Easily set up sampling plans by area, location and operating parameter, saving operator time. Eliminate setup errors and save time by exporting setup configuration to USB memory stick and deploy your sampling plan across your entire particle counting fleet!

ISO 21501-4 reliability and accuracy
Designed for exceptional particle counting performance providing ISO 21501-4 compliant unit-to-unit accuracy and reproducibility

Spec

Value

Number of Size Channels

6

Particle Sizes

0.1, 0.2, 0.3, 0.5, 1.0, 5.0µ

Light Source

Helium Neon Laser

Weight

Without battery: 15.9 kg (35 lbs), Battery: 0.66 kg (1.45 lbs)

Dimensions

33 W x 55.9 D x 22.9 H cm (13 x 22 x 9 inches)

Enclosure

Easy to clean Stainless Steel

Flow Rate

1.0 CFM (28.3 LPM)

Zero Count

ISO 21501-4 and JIS B 9921: 1 count or less in 5 minutes, 95% UCL

Coincidence Loss

5% at 50,000 /ft3 per ISO 21501-4 method

Pump

Patented multi-lobe closed loop controlled rated for continuous use

Counting Efficiency

50% at 0.1 μm; 100% for particles > 0.15 μm per ISO 21501-4 and JIS B 9921

Operating Temperature

10° to 40°C (50° to 104°F); 10 to 90% relative humidity, non-condensing

Display

¼ VGA Color TFT touch screen

Printer

High speed thermal

Language

English, French, German, Italian, Spanish, Korean*, Japanese*, Chinese

Maximum Count Displayed

9,999,999 displayed

Delay Time

15 seconds to 23 hours 59 minutes 59 seconds

Sample/Hold Times

1 second to 23 hours 59 minutes 59 seconds

Count Alarms

1 to 9,999,999 counts

Locations

ID: 0 to 999; NAME: Alphanumeric, appears on printout

Data Storage

5,000 samples, scrollable on Historical Data review screen (FIFO or Overflow)

Outputs

USB Client (Version 1.1) USB Host (Version 1.1) RS-485 Ethernet with TCP/IP protocol Wireless with 802.11g protocol (optional) Met One 3432 manifold Auxiliary (alarm and scan probe)

Communication Protocol

Modbus TCP , Modbus RTU , Serial FX

Inputs

Air Velocity Probe, RH/Temperature Probe

Auto CDA Purge

Purge solenoid activated by connection to Clean Dry Air source

Power

24 VDC with 100-240 VAC, 50/60 Hz adapter

Battery Type

Lithium ion smart battery; rechargeable, ejectable, and hot-swappable

Battery Operating Time

3 hours minimum

Battery Recharge Time

6.75 hours minimum, 10 hours maximum

Battery Quantity Included

2 each

 

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